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A Micromachined, Membrane Based, Thermoelectric Flow Sensor for 2-Dimensional Measurement with High Angular Resolution


Authors

  • Hartgenbusch, N.
  • Borysov, M.
  • Jedermann, R.
  • Lang, W.

Meta information [BibTeX]

  • Year: 2018, Reviewed
  • In: 2018 IEEE SENSORS
  • Conference: in New Delhi, India
  • Publisher: IEEE
  • Pages: pp. 1-4
  • ISBN: 978-1-5386-4708-0, eISBN: 978-1-5386-4707-3
  • DOI: 10.1109/ICSENS.2018.8589684




Arbeitsgruppe IMSAS




Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
A Micromachined, Membrane Based, Thermoelectric Flow Sensor for 2-Dimensional Measurement with High Angular Resolution
In: 2018 IEEE SENSORS. IEEE, 2018, pp. pp. 1-4
(Workgroup: IMSAS)
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